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Research Domain: Semiconductor Processing and Surface Reactivity
Keyword: Stacey F. Bent
Research Production: Current Research Projects

The research in our laboratory is focused on understanding and controlling surface and interfacial chemistry and applying this knowledge to a range of problems in semiconductor processing, nanotechnology, photovoltaics, and biomaterials. The role of interfaces becomes increasingly important as system dimensions are scaled downward. For example, most electronic and optoelectronic devices are undergoing rapid scaling, with lengths moving into the nanometer range and the surface to volume ratio becoming very large. The function of many next-generation electronic and nanoscale devices will therefore depend critically on the ability to control and modify the properties of their interfaces.

Much of our research aims to develop a molecular-level understanding in these systems. Our work therefore involves use of a variety of molecular probes. Techniques used in the research include optical spectroscopies such as multiple internal reflection Fourier transform infrared (MIR-FTIR) spectroscopy, X-ray photoelectron spectroscopy (XPS), and single-photon ionization (SPI), together with microscopies such as scanning tunneling microscopy (STM), atomic force microscopy (AFM), and scanning electron microscopy (SEM).

Systems currently under study in the group include organic functionalization of semiconductor surfaces, mechanisms and control of atomic layer deposition, chemical vapor deposition of organic conducting polymers, low k dielectric film integration, and retinal implants and neural prosthesis. More detailed information on the individual research projects in the group can be found at http://bentgroup.stanford.edu/research.html regarding:

* Organic Modification of Semiconductor Surfaces
* Atomic Layer Deposition: Mechanisms of ALD and Area-Selective ALD
* Inorganic and Organic Semiconductor Growth
* Probing Radicals in Materials Processing
* Probing Low-k Dielectrics at a Molecular Level
* Microfabrication for the Development of Retinal Implants

Ph.D. Stanford University, 1992. National Science Foundation CAREER Award, 1995; Beckman Young Investigator, 1997; Research Corporation Cottrell Scholar, 1998; Camille Dreyfus Teacher-Scholar, 1998; Peter Mark Memorial Award, 2000; Coblentz Award, 2001, Fellow of the AVS, 2006, Tau Beta Pi Award for Excellence in Undergraduate Teaching, 2006.
Remarks: Department of Chemical Engineering
Stauffer III, Room 215
(650) 723-0385
Email:stacey@chemeng.stanford.edu
Unit:Stanford University 
Original file: No File

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